Reveal the Pattern
Apogee™ Spin Developer
Up to 200 mm round or 7" x 7" square
Cee® 300XD Spin Developer
Up to 450 mm round or 14" x 14" square
Repeatable, complete spin developing the first time, every time.
WHY RISK IT?
After a long, multi-step process, you’re finally ready to reveal the pattern. Don’t take unnecessary risk! Perfectly develop your wafer with unprecedented precision and control on the Apogee™ Developer, without the investment of a track system.
GET STARTED NOW!
1. Get a quote
Answer a few simple questions and receive your quote.
2. Install the equipment
Installation is quick and easy with the included step-by-step instructions.
3. Run With Confidence
From installation to process guidance, enjoy reliable support from our world class team.
Program. Monitor. Analyze.
Stop wondering what went wrong. DataStream™ monitors and records all processing parameters in real-time. Proactive warnings and detailed log files give you the information you need to succeed.
Single substrate spray developing is used when tank immersion or batch processes aren’t good enough. By controlling the liquid materials dispense in coordination with wafer rotation and unlimited recipe steps, stable, repeatable pattern development is achieved.
All Cee® Spin developers can be configured for fan style top-spray or side-spray, and puddle dispense using multiple materials such as pre-wets, developer, rinse agents, solvents and nitrogen blow-off to enhance drying. These tools are routinely used for the exacting needs of leading edge photolithography, e-beam lithography, thick film MEMS and bio-medical processing as well as photomasks and other exotic substrates.
Optional programmable exhaust management offers another layer of recipe control over critical processes.
When consistency and yield matter, Cee Spin Developers have the performance and control you need.