The Cee® AccuScan™ Dispense is designed for use with the Apogee® Spin Coater, to provide precise and uniform dispensing for semiconductor substrates. This automated dispense system enhances the efficiency and accuracy of the process, ensuring optimal performance in semiconductor fabrication.
Related Information
Scanning dispense: move the arm from center to the edge while dispensing
Edge bead removal: precisely set the arm position to remove material at the edge of the wafer
Standard dispense: move the nozzle to 0mm to dispense in the center of the wafer
Offset dispense: dispense material offset from the center to leave an uncoated area in the middle of the wafer
Off-wafer pre-dispense: dispense in the park position to clear nozzle before on wafer dispensing
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