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Case Studies

Edge Bead Removal

Edge Bead Removal (EBR) removes excess material from the edge of a coated substrate. A solvent is applied to the outside perimeter of the spinning substrate, removing the photoresist at the edge.

  • manually adjustable nozzle to accommodate varying substrate sizes and edge exclusions
  • fully automated via DataStream™ recipe controls
  • fluid path consists of PFA, PTFE, and  304/316 stainless steel 
  • integrated valve provides adjustable flow control and suckback
  • pressure can source
    • N2 or CDA pressurized chemical reservoir 
    • DataStream™ integrated empty float sensor
    • optional PFA coating
    • available sizes are 1-10gal (3.7-37 L)

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