AccuScan™ is a major capability upgrade for your Apogee® spin coater. Bring radial stream dispensing and high-precision edge bead removal into one automated coating sequence, with control over where material lands, how the nozzle moves, and when each dispense takes place.
Requires a four-position dispense control box, sold separately. One box supports up to four dispenses. Need more than four dispenses? Add four-position dispense control boxes to expand your system.
AccuScan™ gives you programmable control over how material is dispensed and where it lands on the wafer. Use the arm in five ways, with nozzle position and motion defined around your process:
DataStream™ coordinates arm movement and dispense selection within the process sequence. Up to three nozzles provide options for multiple coating materials or a dedicated edge-treatment fluid. Off-wafer pre-dispense clears the nozzle before on-wafer delivery, and the arm parks away from the wafer between processes.
Cleanroom-compatible construction combines an acetal arm with a hub-less lid design. AccuScan™ operates without an external power supply.
Choose the AccuScan™ option for your Apogee® 200 or Apogee® 450 spin coater, then define your wafer size, coating material, viscosity, and dispense sequence. For radial dispensing, define the intended start and end positions. For EBR, include the solvent and desired edge exclusion so nozzle placement and delivery can be configured around the application.
Cartridge dispense, pressure can dispense, and dispense pumps provide different approaches to material storage and delivery. Choose the supply around batch size, refill frequency, chemistry, and viscosity, then pair it with the appropriate tubing, valve, and tip.
For pressure can supply, choose a 1, 2, 3, 5, or 10 gallon reservoir and standard stainless steel or PFA-coated construction to suit the material, usage, and refill frequency.
X-Pro pressure can storage: 1- and 2-gallon pressure cans fit inside the X-Pro in the designated storage area. Pressure cans larger than 2 gallons must be located outside the X-Pro.
The AccuScan™ arm is supplied pre-mounted with nozzles and assorted tips. Dispense systems and the control box are required and sold separately. Review nozzle selection, radial motion, fixed dispense positions, pre-dispense, and edge-treatment steps as one sequence so the configuration supports the complete process.
For the developer version with scanning spray delivery, see AccuScan™ Spray Dispense.
0.1 mm resolution; ±50 µm accuracy
0–50 mm/s
Up to three
9″ (228.6 mm) behind the tool
9″ (228.6 mm) behind the tool
2″ (50.8 mm) above the standard tool height
Apogee® spin coater
Cartridge, pressure can, or pump
Center, offset, scanning, off-wafer pre-dispense and park
Need heated dispensing, a special delivery method, or a configuration you don’t see here? Cee® offers custom solutions built around your material, equipment, and process.
See examples of our custom equipment, then contact Cee® to discuss your dispense requirements.
SEMICON EUROPA · 10–13 NOVEMBER
Meet Jacob, CEE’s Global Sales Director, in Munich with our partner SiSTEM Technology.
Stand C1353 · Messe München
Spin coating, bake and chill, temporary bonding and debonding.
Mention Jacob from CEE in SiSTEM’s booking form.
