Products / Dispenses

Start with your dispense process.

Explore coating, developing, rinsing, and drying options for Cee® equipment. Choose your equipment type or browse every dispense method below.

Start with the dispense control box

The dispense control box is used for automated dispensing. One control box supports up to four dispenses. Need more than four? Add dispense control boxes to expand your system.

COATING MATERIAL DELIVERY

Form a puddle. Build the coating.

Deliver a controlled stream, then choose the reservoir or pumping system that fits your material and usage.

PROGRAMMABLE COATING DELIVERY

A major upgrade in dispense control

Expand your coating capabilities with five recipe-controlled dispense modes. Precisely position material, program arm movement, and tailor each dispense to your process.

DEVELOP & CLEAN

Cover the wafer with a fan spray.

Fixed fan-spray delivery for developing and cleaning processes.

PROGRAMMABLE DEVELOP & CLEAN

Scan a fan spray across the wafer.

Precisely position and scan the fan spray for demanding processes such as metal liftoff, precision cleaning, and high aspect ratio applications.

CONTROL THE WAFER PERIMETER

Remove coating at the edge.

A narrow solvent stream creates a controlled edge exclusion during spin coating.

KEEP THE UNDERSIDE CLEAN

Rinse the back side of the wafer.

An upward liquid stream removes unwanted process material from the substrate back side.

CENTER-FOCUSED DRYING

Finish with a controlled drying step.

A directed gas jet helps dry the wafer after wet processing.

APPLICATION-SPECIFIC DELIVERY

Build around your process.

Cee® offers customized dispense solutions for applications that need a different approach. Explore examples of our custom equipment, then contact Cee® to discuss your process requirements.

Find the right dispense for your process.

Tell us your Cee® equipment, substrate size, material chemistry, viscosity, and desired dispense sequence. We can help match the delivery method and fluid path to your application.