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Spray Dispense

Driven by advances in decreasing feature sizes, spray dispense has risen as a highly effective and versatile development and cleaning method. Compared to emersion and puddle methods, spray dispense increases throughput and yield for today’s advanced processes.

  • flat spray provides uniform coverage of the substrate
  • choose from 110­° for large or 40° for smaller substrates
  • multi-axis adjustability to optimize the coverage area 
  • fully automated via DataStream™ recipe controls
  • fluid path consists of PFA, PTFE, and  304/316 stainless steel 
  • integrated valve provides adjustable flow control and suckback
  • pressure can source
    • N2 or CDA pressurized chemical reservoir 
    • DataStream™ integrated empty float sensor
    • optional PFA coating
    • available sizes are 1-10gal (3.7-37 L)

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