Automated Dispense Systems

Magnified image of resin dispense during a spin coat process.

This article explores automated dispense options for spin coating applications in the semiconductor industry including cartridge dispense, pressure can dispense, and disposable syringe dispense. The article also touches on dispense controls, edge bead removal, and backside rinse, while highlighting the benefits of the Cee® line-up of Apogee® Spin Coaters.  Automated Dispense Systems Spin coating is […]