Edge Bead Removal and Backside Rinse Demystified
Edge bead removal is used to eliminate build up while backside rinse prevents contamination. Using an automated system for both processes results in precise, efficient, and consistent results with minimal operator intervention. Introduction Edge bead removal (EBR) and back-side rinse (BSR) are critical processes in the fabrication of high-quality micro and nanoscale devices such as […]