Bake Plate Process Theory
Hotplate baking is a popular technique for film drying and curing, offering advantages over traditional convection ovens such as decreased bake time, increased uniformity, reproducibility, and decreased particle contamination. Hotplate baking heats the substrate from the bottom up, preventing the formation of a skin on the film surface and offering advantages for thick films. Bake […]
Multi-Stage Baking with Programmable Lift Pins
Smart-Pin technology enables flexible temperature ramping and uniform baking for thermal shock sensitive materials. The lift pin height recipe utilizes a temperature matrix for soft bake, PEB, and post-develop hard bake. The programmable system eliminates the need for multiple bake plates and is suitable for thick-film materials and mitigating the “skin” effect. Multi-Stage Baking with […]