Bowl Liners

  • protect your Apogee® spin bowl
  • thermoformed polyethylene
  • reusable or disposable
  • easy-to-clean
  • capture (low-volume) or direct to waste
Select an option to see details.
Product Information

Overview

Cee® Bowl Liners provide a removable, protective barrier inside the spin bowl of Apogee® Spin Coaters and Apogee® Spin Developers. Manufactured from chemical-resistant HDPE (High-Density Polyethylene), bowl liners capture excess coating material and chemical runoff before it contacts the primary bowl surface.

In spin coating and developing applications where multiple materials are processed or heavy buildup may occur, isolating residue becomes critical. Bowl liners support faster changeover between chemistries, reduce cleaning time, and help preserve long-term bowl integrity. The result is improved process cleanliness, reduced downtime, and greater operational flexibility.


Key Capabilities

Bowl liners are precision-formed to match the internal geometry of Apogee® spin bowls, ensuring stable performance.

By containing excess material within a removable insert, bowl liners:

  • Reduce residue accumulation on the primary bowl surface

  • Simplify cleaning between runs or material transitions

  • Support chemistry segregation in multi-material environments

  • Minimize cross-contamination risk

For facilities processing materials that may precipitate, polymerize, or react with residual films from previous runs, bowl liners provide a controlled method for isolating chemistries. When switching between compatible (non-hazardous) materials, operators can remove and replace the liner rather than perform extensive bowl cleaning.

Bowl liners are considered consumable components. In some applications, they are treated as single-use items. In others, customers report use across hundreds or even thousands of cycles depending on chemistry, throughput, and internal cleanliness standards.

Combine with the Splash Ring accessory to further manage expelled material dynamics in high-speed or large-substrate applications.


Compatibility

Bowl liners are available for:

  • Apogee® 200 Spin Coater

  • Apogee® 450 Spin Coater

  • Apogee® 200 Spin Developer

  • Apogee® 450 Spin Developer

Available for all mounting configurations, including benchtop, flange-mounted, and integrated workstation installations.
  • Bowl Liner (Qty. 5)
  • Installation/Operations Manual
Material

HDPE

Drain Configuration

Closed or Open (see manual)

Dimensions
Apogee® 200 Bowl Liner Dimensions

Diameter: 11.5″ (292mm)

Height: 4.375″ (111mm)

Apogee® 450 Bowl Liner Dimensions

Diameter: 24″ (610mm)

Height: 5.375″ (137mm)

You May Also Like

Support and Sales Reach out
Leading the industry in high performance wafer-processing equipment since 1987.
An operator holding a patterned silicon wafer.