The KU Nanofabrication Facility includes Cee® spin coating and bake systems within its open-access cleanroom environment, supporting thin-film deposition and thermal processing steps used in lithography workflows. Spin coating is used to apply material layers for patterning, followed by controlled bake steps to prepare and stabilize those films for subsequent processing.
These systems are integrated into a shared user facility, enabling consistent coating and thermal processing across a range of research applications. The inclusion of both spin coating and bake capabilities supports repeatable film formation and process control within a multi-user nanofabrication environment.
