This work presents a scalable glass-based microfluidic bioelectrochemical cell platform designed for multiplexed studies of microbial extracellular electron uptake. In the fabrication sequence, 100 mm borosilicate glass wafers are first prepared and then coated with KL8020 HMDS Spin-On Primer using an Apogee® Spin Coater, followed by a soft bake at 115°C for 3 minutes to promote photoresist adhesion. The lithography stack then includes sequential spin coating of LOR 10B and Microposit™ S1805™, with defined soft-bake steps of 10 minutes at 195°C and 1 minute at 115°C, respectively.
Later process steps also explicitly call out AZ P4620 photoresist for protecting electrode areas during chlorination and SU-8 2100 photoresist, spin coated to 100 µm thickness, for fabrication of the PDMS replica mold. Together, these details make this a strong reference for Apogee® use in university microfabrication, with clearly stated resist materials, coating steps, and substrate formats tied directly to the device fabrication
