Cee® Apogee Spin Coater – Washington Nanofabrication Facility

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Spin Coater, 200mm Spin Coater, Apogee® 200 Spin Coater
Source:Washington Nanofabrication Facility, University of Washington
Material: Unknown
Source:Unknown
The Washington Nanofabrication Facility tool list explicitly includes a Cee® Apogee Spin Coater within its Lithography and Direct Patterning area.
Publication Year: Unknown

Process Overview

The Washington Nanofabrication Facility lists a Cee® Apogee Spin Coater as part of its open-access cleanroom tool set. The tool is identified on the facility list with Coral ID WNF–SPIN5 and is categorized under Lithography and Direct Patterning, making it a clear university facility reference for Cee® equipment in shared nanofabrication use. The available source snippet does not expose additional details such as materials, wafer size, or linked bake/develop tools, so those should be left unspecified for this entry.

Related Research

Tools – BioNIUM Nanofabrication Facility

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Spin Coater, 200mm Spin Coater, 200X (Legacy)
The University of Miami BioNIUM nanofabrication facility tool listing explicitly includes a Cee® 200X Precision Spin Coater as part of its lithography-related equipment set.

Direct Photopatterning of Metal Oxide Structures Using Photosensitive Metallorganics

4 inch
MIBK
Spin Coater, 200mm Spin Coater, 100 (Legacy)
This Georgia Tech paper describes direct photopatterning of mixed-metal oxide films using a photosensitive metallorganic precursor. The precursor films were spin coated onto 100 mm single-side polished silicon wafers using a Cee® Model 100 CB Spin Coater and Bake Unit

Cee® Spin Coater & Baking Tools – University of Kansas Nanofabrication Facility

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Spin Coater, 200mm Spin Coater, 200X (Legacy), Bake Plates, Apogee® 200 Bake Plate, 1300X (Legacy)
The University of Kansas Nanofabrication Facility lists a Cee® coat and bake workflow that includes a Cee® 200CBX Programmable Spin Coater, Cee® 1300X Hot Plate, and Cee® Apogee® Hot Plate. The page also states that the 200CBX supports multiple chuck sizes for a variety of substrate sizes.