Design and Fabrication of an Electronic Skin Sensor and Sensor Array for Contact Pressure Monitoring during Colonoscopy

Spin Coater
Bio Sensing Devices
Materials: AZ10XT

University of Minnesota, M.S. thesis by Issahaku Walaman-i

Apogee® 200 Spin Coater

Wafer Size: 100mm

Substrate Type: Si

This thesis describes fabrication of a flexible electronic skin sensor and sensor array for colonoscopy pressure monitoring and explicitly shows AZ 10XT photoresist being applied to a silicon wafer mounted in an Apogee® Spin Coater during the electrode preparation process.

Publication Year: 2025

Process Overview

This thesis focuses on development of a flexible capacitive electronic skin sensor for contact pressure monitoring during colonoscopy, using micro- and nanofabrication techniques to build the sensor structure. In the fabrication section, the electrode preparation workflow explicitly includes HMDS vapor priming followed by coating AZ 10XT photoresist on a silicon wafer mounted in an Apogee® Spin Coater. The document also shows spin-coated, cured PDMS on a 4-inch silicon wafer and spin-coated, cured Ecoflex on a 4-inch silicon wafer, tying the spin coating process to both substrate preparation and photolithographic patterning steps in the overall sensor fabrication flow. This makes the thesis a solid university research reference for Apogee® use in flexible sensor fabrication.

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