Cee® Automatic Developer – Texas A&M AggieFab

AggieFab (Texas A&M University)
Apogee® 200 Spin Developer
Wafer Size: Not Specified
Substrate Type: Not Specified
Texas A&M AggieFab lists a Cee® Automatic Developer used for photoresist development following exposure, supporting lithography workflows in a university cleanroom.
Publication Year: Unknown

Process Overview

This Texas A&M AggieFab equipment page identifies a Cee® Automatic Developer used for post-exposure photoresist processing within the facility. The system is integrated into lithography workflows, where exposed photoresist is developed using controlled chemical processing to define patterned features. The page ties the developer directly to standard cleanroom operations, supporting consistent and repeatable development steps following coating and exposure. This makes it a strong facility-level reference showing use of Cee® equipment beyond coating, extending into automated development processes within academic nanofabrication environments.

Related Research

Off-Stoichiometry Thiol–Ene Polymers: Inclusion of Anchor Groups Using Allylsilanes

This paper develops OSTE-AS polymers for bonding and integration with silicon wafers and explicitly states that the OSTE-AS prepolymers were deposited on silicon wafers using a Cee® Apogee® Spin Coater module of an X-Pro II Workstation. The paper also reports 100 mm silicon wafers and gives resulting film thicknesses of 12.9 µm, 4.9 µm, and 3.4 µm at 1000, 3000, and 5000 rpm, respectively.

Omnidirectional Circularly Polarized Thermal Radiation Enabled by Chiral Metasurface

This paper describes fabrication of a chiral metasurface for circularly polarized thermal radiation and includes use of a Cee® Apogee® Spin Coater and Cee® Apogee® Bake Plate in the sample preparation flow, including spin coating of PMMA 950 K A4.

Microfluidic Bioelectrochemical Cell Platform for the Study of Extracellular Electron Uptake in Microbes

This preprint describes fabrication of a glass-based microfluidic bioelectrochemical cell platform and explicitly states that KL8020 HMDS Spin-On Primer was spin coated on 100 mm borosilicate glass wafers using an Apogee® Spin Coater. The broader lithography flow also includes spin-coated LOR 10B, Microposit™ S1805™, AZ P4620, and SU-8 2100.