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Recessed Spin Chucks

Recessed Spin Chuck
Microscope Slide Chuck
  • Recommended for square and rectangular substrates
  • Common for microscope slides, photomasks, displays, etc.
  • Increases coating uniformity at the corners and edges
  • Standard Delrin® construction compatible with a wide variety of chemicals
  • Chucks are made to order based on substrate width, length and thickness
  • Available in custom configurations such as material, edge contact, and non-vacuum
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Related Information

Captive Spin Chucks

20191105_073534
20191105_074418
  • Recommended for square and rectangular substrates
  • Common for microscope slides, photomasks, displays, etc.
  • Used primarily for developing and cleaning
  • Substrates are always centered and balanced
  • Chucks are made to order based on substrate width, length and thickness
  • Available in custom configurations such as material, edge contact, and non-vacuum
GET QUOTE

Related Information

SEMICON EUROPA · 10–13 NOVEMBER

Bring your process questions.

Meet Jacob, CEE’s Global Sales Director, in Munich with our partner SiSTEM Technology.

Stand C1353 · Messe München
Spin coating, bake and chill, temporary bonding and debonding.

Book a stand meeting →

Mention Jacob from CEE in SiSTEM’s booking form.