Selecting Maximum Spin Speed and Acceleration
In spin coating, the speed and acceleration of a spinning substrate affect the thickness and quality of a film. The substrate’s rotational speed affects the centrifugal force and air turbulence, while its acceleration affects the film’s properties. The initial spin cycle is critical because the resin dries quickly, and up to 50% of base solvents […]
Programmable Exhaust for Optimal Thick-Film Spin Coating
For ultra-high uniformity on thick films in spin-coating processes, precise control of solvent vapors is crucial. This is achieved through a closed bowl environment and a programmable exhaust module. The process involves a prewet dispense step, dynamic dispense step, and drying step to create a highly uniform coating. Spin speed, acceleration, and drying rate are […]