The Cotton Candy Effect
The cotton candy effect is a common issue in the semiconductor manufacturing process where dried material comes off the substrate in string-like filaments instead of droplets. To address this issue, process parameters and environmental factors should be adjusted. Optimization testing is required to fine-tune the process until the cotton candy effect is eliminated. The Cotton […]
Programmable Exhaust for Optimal Thick-Film Spin Coating
For ultra-high uniformity on thick films in spin-coating processes, precise control of solvent vapors is crucial. This is achieved through a closed bowl environment and a programmable exhaust module. The process involves a prewet dispense step, dynamic dispense step, and drying step to create a highly uniform coating. Spin speed, acceleration, and drying rate are […]