Overview

The Cee® Spin Bowl Purge introduces nitrogen or another compatible inert gas through diffusers mounted to the Apogee® Spin Coater lid. By displacing ambient air from the process bowl, the system helps establish a low-oxygen environment for oxygen-sensitive coating materials. Effective purging depends on both gas supply and exhaust conditions.

Key Capabilities

• lid-mounted sintered diffusers distribute inert gas throughout the process bowl
• manual configuration uses a mechanical slide valve to turn purge flow on or off
• automated configuration enables or disables purge flow by recipe step through DataStream™ dispense controls
• supports processing of oxygen-sensitive materials
• can be used with OptiFlow™ exhaust control or appropriately reduced facility exhaust

Select manual or automated purge based on the required process control. In automated configurations, purge timing is managed through the equipment’s dispense system. Proper exhaust management helps maintain the desired bowl environment.

Safety & Facilities

A clean, dry supply of nitrogen or another compatible inert gas is required. Confirm the appropriate pressure and flow settings for the installed purge configuration and ensure facility exhaust is operating correctly. Inspect the pneumatic tubing and connections before use. Inert gases can displace breathable oxygen, so follow facility ventilation and gas-handling requirements.

Compatibility

Available in manual and automated configurations for Apogee® 200 and 450 Spin Coaters, including benchtop, flange-mounted, and workstation installations where supported by the equipment configuration.