The ultimate solution for a complete wafer processing workflow. Seamlessly integrate Apogee® process modules to streamline operations. Enhance safety, enjoy convenience, and maximize productivity from day one.
Mix and match Apogee® process modules to create a tailored, high-performance workflow for coating, baking, or developing.
Eliminate the complexities of sourcing from multiple vendors with a fully customizable solution to streamline your semiconductor processing. Built-in fume control, dedicated chemical storage, and ergonomic design offer the perfect alternative to traditional wet benches. Delivered fully assembled, tested, and ready to run; simply plug it in and start working.
Engineered for superior performance, usability, versatility—and peace of mind.
Emergency-off button provides a safe, rapid shutdown of the entire workstation.
The balanced window sash holds any position, providing safe operation without restrictions.
Integrated lower cabinet fume exhaust and a roll-out drawer for secondary containment of process chemicals.
Integrated, adjustable, N2 Blow Off Gun for process convenience.
Built-in yellow workstation lighting, safe for UV sensitive materials.
Built-in USB charging and power outlet to support secondary equipment.
NRTL certification is crucial for semiconductor equipment, ensuring compliance with safety standards set by regulatory bodies like OSHA and ANSI.
Cee® workstations are NRTL listed right out of the box…
…your safety department is going to love you.
When advanced processes require advanced features, Cee® has you covered. Personalize your spin coater right from the factory.
Protect your team and keep your safety department happy with the X-Pro Safety Package. Up to four sensors monitor critical safety parameters; featuring automatic shutdown, and real-time audible and visual alerts.
Need more capacity? Seamlessly link multiple X-Pro Workstations from the factory to create a larger, fully integrated workspace—expanding your capabilities without disrupting your process flow.
Get the extra space you need to keep tools, supplies, and chemicals within reach. Access from inside the sash and outside via a door, keeping your workflow smooth and organized.
Up to four 200mm modules and/or two 300mm modules
750 lb (340kg)
1000 lb (454kg)
Drawer: 6.8 ft² (0.637m²)
Side Compartments: 6.8 ft² (0.637m²)
W: 70″ (1778mm)
D: 44″ (1118mm)
H: 85″ (2159mm)
W: 75″ (1905mm)
D: 48″ (1220mm)
H: 96″ (2439mm)
208-230 VAC, 50/60Hz, 1 Phase
8″ OD, 50cfm
26.2A (max)
8″ OD, 540cfm
1/4″ Push to Connect, <33kPa abs
1/4″ Push to Connect, 70psi (482kPa)
Refer to each module’s utilities for addition exhaust and drain requirements
With four decades of experience, our experts will collaborate closely with you to understand your requirements and deliver solutions that exceed expectations.
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Cee® is a registered trademark of Cost Effective Equipment, LLC.
