Handheld Centering Devices help position a circular wafer on its spin chuck before processing. Each fixture is matched to both the wafer diameter and the physical chuck diameter, giving operators a repeatable reference for placement.
Need the matching chuck or a chuck set?
A handheld centering device mates to the outside of a circular chuck and guides the wafer into position before processing. The fixture gives operators a repeatable reference for placement and is removed before the spin program begins.
Engage the fixture with the outside radius of the chuck, place the wafer on the chuck and gently bring its edge against the device’s reference surface. Turn on vacuum and confirm substrate-present status. Move the device away from the wafer and completely out of the spin bowl before closing the lid and starting the recipe.
Inspect the device for residue, damage or loose parts before daily use. Keep its contact surfaces clean to reduce the risk of wafer contamination, and follow the Centering Device Manual for cleaning and handling guidance.
These devices support wafer placement on circular chucks. Recessed and captive chucks locate their specified substrates using a recess or arms and normally do not need a separate handheld fixture.
Choose both the wafer diameter and the physical chuck diameter. A 200 mm wafer has separate devices for 4″ and 6.188″ chucks, so check the chuck fitted to your tool before selecting a SKU. Refer to the Chuck Sizing Chart when selecting the chuck itself.
|
Wafer diameter
|
Chuck diameter
|
SKU
|
|---|---|---|
|
3″
|
2.25″
|
902835
|
|
100 mm
|
2.25″
|
902681
|
|
150 mm
|
4″
|
902682
|
|
200 mm
|
4″
|
902691
|
|
200 mm
|
6.188″
|
902858
|
|
300 mm
|
6.188″
|
902859
|
The manual also lists 2″ and 125 mm wafer configurations. Contact Cee for these or other custom requirements.
Provide the selected SKU, wafer diameter, physical chuck diameter and Cee tool model when requesting a quote. Include any special substrate or handling requirements. For individual chucks and chuck sets, visit Circular Spin Chucks.
Delrin
Outside radius of the matching chuck
Supplied by the tool and spin chuck
Device removed from the spin bowl
Confirm wafer, chuck and Cee tool
