Microelectrode Arrays for Electrochemical Cycling of Individual Battery Particles

How Cee® equipment is used

The electrode-array fabrication method identifies an Apogee® spinner for LOR and S1813 resist processing. The arrays enable electrochemical cycling of individual battery particles.

Equipment reported

Apogee spinner

Source type

Research paper

Publication year

Not recorded

Materials

S1813

Substrate

Not reported

Source

ACS Publications

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include S1813.