Fluorinated silane coating compositions for thin wafer bonding and handling

How Cee® equipment is used

Examples1–6 solutions coated on100mm silicon using Cee100CB and then baked on the Cee100CB hotplate. The documented Cee role is coating or layer preparation within the temporary-support process.

Equipment reported

Cee® 100CB

Source type

Patent experimental example

Publication year

Not recorded

Materials

Not reported

Substrate

Si

Source

Google Patents

Process context

This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims.