Rapid fabrication of a microelectronic temporary support for inorganic substrates

How Cee® equipment is used

Process applies liquid support material with a Brewer Science CB-100 coater. The documented Cee role is coating or layer preparation within the temporary-support process.

Equipment reported

Cee® CB-100 (source wording)

Source type

Patent experimental example

Publication year

Not recorded

Materials

Temporary Bonding Adhesive

Substrate

Not reported

Source

Google Patents

Process context

This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims. Materials recorded for this reference include Temporary Bonding Adhesive.