Home » Products » Bake Plates – Hot Plates » Apogee 200 Bake Plate – X-Pro
Enhance your process efficiency with the Apogee® Bake Plate as part of a fully integrated solution. Pair with other Apogee process modules in the X-Pro II Workstation for a smooth factory-direct setup that simplifies your workflow.
Whether you need a single tool or ten, fume control or a cleanroom environment, the Cee® X-Pro II Workstation is the perfect alternative to typical wet benches.
Enjoy unrivaled repeatability and uniformity in every bake process. Built for long-lasting durability and backed by lifetime process support, Apogee® Bake Plates are your ideal solution for automated bake processing.
Engineered for superior performance, usability, versatility—and peace of mind.
On-board 7-inch color touchscreen with DataStream™ OS included for visibility and your ease-of-use.
Adjustable wafer stops for precise centering of various substrate sizes, round or square, for maximum versatility.
Featuring type III military-grade hardcoat anodized surface—ultra-flat, extremely scratch-resistant, and built to last.
Smart Pin™ Technology and precision ramping controls enable multi-stage baking and gentle warm-up for delicate, thermally sensitive substrates.
Recipe-controlled baking: with vacuum, gas-proximity, gravity contact, or Smart Pin™ Technology, you get complete process control.
Knowledge is power. With DataStream™ technology, monitor and manage in real time, ensuring production-quality results from anywhere. Proactive warnings and detailed log files give you the information you need to succeed.
Process parameters and measurements are logged in real-time. Export in multiple formats for analysis, troubleshooting, and process optimization.
Access your Apogee® Bake Plate remotely via any web browser for real-time monitoring, adjustments, and recipe management. Create, modify, upload, download, and archive recipes seamlessly.
NRTL certification is crucial for semiconductor equipment, ensuring compliance with safety standards set by regulatory bodies like OSHA and ANSI.
Cee® bake plates are NRTL listed right out of the box…
…your safety department is going to love you.
When advanced processes require advanced features, Cee® has you covered. Personalize your bake plate right from the factory.
Bake process sensitive to oxidation? Shield your wafer with a blanket of nitrogen or other inert gas with the N2 Purge option.
Crank up the heat! Upgrade your Apogee® Bake Plate to allow for processes that demand a high temperature bake.
Busy workbench? Give your wafer a dedicated cool-down spot. Bring fresh baked wafers to room temperature in seconds with the optional Chill Station.
200mm Round or 8″ x 8″ Square
2 inch Round (smaller sizes supported with limited functionality)
300°C (400°C optional)
0.1°C
±0.3% across working area
7″ Full Color Touchscreen (included)
0-19 mm
Unlimited / Unlimited
0.1 mm
0.1 s
65 lb (29.5kg) – Add X-Pro II Workstation for Final Weight
110 lb (50kg) – Add X-Pro II Workstation for Final Shipping Weight
N/A (Pre-Installed Into X-Pro II Workstation)
N/A (Pre-Installed Into X-Pro II Workstation)
208-230 VAC (Supplied by X-Pro II Workstation)
1/4″ Push to Connect, 35psi (241kPa) (Supplied by X-Pro II Workstation)
6.3A (@208V) (Supplied by X-Pro II Workstation)
1/4″ Push to Connect, <20″ Hg (33kPa abs) (Supplied by X-Pro II Workstation)
2″ OD, 0.4” H2O@10CFM (100Pa@17 CMH)
With four decades of experience, our experts will collaborate closely with you to understand your requirements and deliver solutions that exceed expectations.
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