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Circular Spin Chucks

Complete Spin Chuck Set
Complete Spin Chuck Set
Small Spin Chuck Set
Small Spin Chuck Set
1/8" Spin Chuck
1/8" Spin Chuck
5/16" Spin Chuck
5/16" Spin Chuck
3/4" Spin Chuck
3/4" Spin Chuck
1" Spin Chuck
1" Spin Chuck
1-1/2" Spin Chuck
1-1/2" Spin Chuck
2-1/4" Spin Chuck
2-1/4" Spin Chuck
4" Spin Chuck
4" Spin Chuck
  • Recommended for standard-thickness, circular substrates and pieces.
  • Thickness of 150μm up to 6mm.
  • Delrin® construction compatible with a wide variety of chemicals.
  • Individual sizes ready to ship: 1/8″, 5/16″, 1/2″, 3/4″, 1″, 1.5″, 2.25″, 4″, and 6.188″ diameters.
  • Available in cost-saving sets.
  • Optional centering devices are available for optimal performance and safe operation.
  • Custom sizes and materials are available on request.

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Spin Chuck Sets

  • The cost-effective solution for diverse substrate sizes.
  • Designed for swift transitions between varying substrates.
  • Delrin® construction for maximum chemical compatibility.

Available Sets

  • Complete Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″, 2.25″, 4″ chucks and extra O-rings
  • Small Diameter Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″ chucks and extra O-rings

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Centering Devices

Centering Devices
Centering Devices
200mm Centering Device
200mm Centering Device
150mm Centering Device
150mm Centering Device
100mm Centering Device
100mm Centering Device
50mm Centering Device
50mm Centering Device
Centering Device In Use
Centering Device In Use
  • Ensures the best coating results and the safest operation.
  • Customized for specific wafer and chuck diameters; ensuring an ideal fit.

Available Sizes

Centering devices are in stock for standard semi-spec wafer diameters:

  •  2″, 3″, 100mm, 125mm, 150mm, 200mm, and 300mm diameters

*Custom sizes are available upon request

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