Circular Spin Chucks provide vacuum holding for round wafers and rigid substrate pieces during coating, developing and cleaning.
Choose a Small Diameter Set or Complete Set for work across several substrate sizes. Both include a base, extra O-rings and a storage case.
Need help centering a wafer? Select a handheld device matched to your wafer and chuck diameter.
A circular chuck holds the substrate through vacuum at the backside contact surface. The substrate must cover all vacuum surfaces to establish proper holding. A clean, flat contact area helps avoid vacuum faults and supports consistent placement between runs.
Place the substrate on the chuck, center it and follow the tool’s on-screen centering instructions before processing. Accurate centering becomes more critical as substrate size increases; a matched handheld centering device can help with placement. Spin speed and acceleration depend on the chuck, substrate size, thickness and weight, and the process recipe.
Standard chucks are Delrin®. Material options include PVDF, PTFE, stainless steel, PEEK and anodized aluminum; select for compatibility with the actual process chemistry. Inspect the contact surface for residue or damage, and remove the chuck from the tool before cleaning to keep solvent out of the vacuum system. Refer to the manual for installation and maintenance instructions.
Start with the substrate diameter or footprint and consult the Chuck Sizing Chart. Physical chuck diameter is different from the supported substrate range. Confirm thickness and backside contact requirements as well as diameter.
An individual chuck suits a defined substrate size. Compare the two sets below for work across several sizes. Both sets in the selector are for the Apogee 200 Spin Coater/Developer.
|
Component
|
Small Diameter Set
|
Complete Set
|
|---|---|---|
|
1/8″ piece
|
Included
|
Included
|
|
5/16″ piece
|
Included
|
Included
|
|
1/2″ piece
|
Included
|
Included
|
|
3/4″ piece
|
Included
|
Included
|
|
1.5″ piece
|
Included
|
Included
|
|
2.25″ chuck
|
—
|
Included
|
|
4″ chuck
|
—
|
Included
|
|
Base
|
Included
|
Included
|
|
Extra O-rings
|
Included
|
Included
|
|
Storage case
|
Included
|
Included
|
Apogee 200 set SKUs: Small Diameter Set 903637; Complete Set 903495.
When requesting a quote, provide your Cee tool model, substrate dimensions, thickness and material, process chemistry, and the selected SKU. Confirm the spindle interface and whether a centering device is needed. Unusual shapes or restricted backside contact may call for a custom chuck.
Standard circular wafers and pieces
Delrin®
Contact Cee for other material options.
Individual chucks and sets
Vacuum
Confirm spindle and chuck compatibility
Depend on chuck, substrate, and recipe
