Deliver fresh process liquid across the wafer with a fixed flat-fan spray. A pressure-can supply, adjustable nozzle position, and recipe-controlled timing make it a practical choice for repeatable developing and cleaning.
Requires a dispense control box, sold separately. One box supports up to four dispenses. Need more than four? Add dispense control boxes to expand your system.
All configurations use a ¼″ liquid line and valve with fixed fan-spray delivery.
A fixed fan-spray nozzle spreads fresh chemistry across the processing surface while the wafer spins. Set the nozzle position and fan coverage for the substrate, then coordinate liquid delivery with the developing or cleaning recipe.
Choose 110° or 40° fan coverage to suit the application. Multi-axis nozzle adjustment, dispense-flow adjustment, and suckback control help match coverage and the start and stop of delivery to the process.
The liquid is supplied from a separate pressure can. Each configuration includes an installed float sensor for empty-reservoir monitoring through DataStream™.
Designed for Apogee® spin developers configured for spray dispensing. A dispense control box supplies automated pressure and valve control and is sold separately.
Choose 1, 2, 3, 5, or 10 gallons around material consumption, refill frequency, and shelf life. Select standard stainless steel or a PFA-coated vessel to suit the chemistry, and confirm compatibility across the complete wetted path.
X-Pro pressure can storage: 1- and 2-gallon pressure cans fit inside the X-Pro in the designated storage area. Pressure cans larger than 2 gallons must be located outside the X-Pro.
Every fixed-spray option uses a ¼″ liquid line and valve. Standard vessels use PCBE and PFA-coated vessels use PCBTE; the line code is 2 and the spray suffix is DS. For example: PCBE-1-2-DS.
Specify the Apogee® developer model, substrate size, chemistry, and required coverage. Match the fan angle, nozzle position, flow, suckback, and recipe timing to the process. For recipe-controlled moving spray coverage, explore AccuScan™ Spray Dispense.
The float sensor is assembled onto the pressure can for supply monitoring through DataStream™.
Purchased separately: The dispense control box.
Flat fan; 110° or 40°
¼″
1–100 cps
1, 2, 3, 5, or 10 gallons
Standard stainless steel or PFA-coated
PFA, PTFE, 304/316 stainless steel
Pressure-can reservoir dimensions are shown below. Allow access to the lid and connections.
1 gallon
11.5″ (29.2 cm)
10″ (25.4 cm)
2 gallons
14.5″ (36.8 cm)
10″ (25.4 cm)
3 gallons
18″ (45.7 cm)
10″ (25.4 cm)
5 gallons
25″ (63.5 cm)
10″ (25.4 cm)
10 gallons
28″ (71.1 cm)
13″ (33.0 cm)
Allow at least 12″ (30.5 cm) above the reservoir for access to the lid and top components.
Nitrogen or clean dry air
70 psi to the dispense control box
DataStream empty-reservoir float sensor
Need heated dispensing, a special delivery method, or a configuration you don’t see here? Cee® offers custom solutions built around your material, equipment, and process.
See examples of our custom equipment, then contact Cee® to discuss your dispense requirements.
