Edge bead removal supplies a controlled solvent stream from a pressure can to the wafer perimeter. The manually positioned nozzle removes unwanted coating at the edge, with rinse timing integrated into the DataStream recipe.
Requires a four-position dispense control box, sold separately. One box supports up to four dispenses. Need more than four dispenses? Add four-position dispense control boxes to expand your system.
⅛″ dispense line and valve · Edge bead removal nozzle
Select your configuration.
Edge bead removal uses a narrow solvent stream to dissolve coating at the outer wafer edge while the substrate spins. Position the nozzle around the desired exclusion area to keep the rinse focused on the perimeter and preserve the central coating region.
A separate pressure can holds the solvent and supplies the ⅛″ dispense valve. Choose reservoir capacity around solvent consumption and refill frequency, with standard stainless-steel and PFA-coated vessels available to suit the chemistry.
The nozzle can be positioned manually for substrate size and edge exclusion. DataStream coordinates the dispense within the coating recipe, while flow and suckback adjustments help tune delivery and limit trailing drips.
Each configuration includes a pressure-can float sensor for empty-reservoir monitoring through DataStream. The dispense control box provides the pressure and valve control for automated delivery and is sold separately.
Select a 1, 2, 3, 5, or 10 gallon reservoir and either a standard stainless-steel or PFA-coated vessel. Confirm the compatibility of the complete wetted path with your EBR solvent.
X-Pro pressure can storage: 1- and 2-gallon pressure cans fit inside the X-Pro in the designated storage area. Pressure cans larger than 2 gallons must be located outside the X-Pro.
The selector combines vessel type and capacity with the fixed ⅛″ line code and EBR outlet. Standard vessels use the PCBE prefix; PFA-coated vessels use PCBTE. For example, a standard 1-gallon system is PCBE-1-1-EBR. Every option on this page uses a ⅛″ line and valve.
Specify your Cee spin coater or developer model, substrate size, process chemistry, and desired edge exclusion. The EBR nozzle is positioned manually at the wafer perimeter. Match solvent flow, suckback, rinse timing, and spin conditions to the coating and exclusion requirements.
A dispense control box is required and sold separately. One box supports up to four dispenses; additional boxes expand the system beyond four.
High-precision EBR with AccuScan™ : Choose a regular AccuScan™ Stream Dispense configuration for the EBR function. The EBR-suffix options on this page are for the manually positioned EBR nozzle.
The float sensor is assembled onto the pressure can for supply monitoring through DataStream.
Purchased separately: The dispense control box.
1–10 gal / 3.7–37 L
Standard stainless steel or PFA-coated
PFA, PTFE, 304/316 stainless steel
⅛″
Manually positioned at the wafer perimeter
Adjustable suckback control
Dimensions below apply to the pressure-can reservoir. The nozzle installation is matched to the Cee tool.
1 gallon
11.5″ (29.2 cm)
10″ (25.4 cm)
2 gallons
14.5″ (36.8 cm)
10″ (25.4 cm)
3 gallons
18″ (45.7 cm)
10″ (25.4 cm)
5 gallons
25″ (63.5 cm)
10″ (25.4 cm)
10 gallons
28″ (71.1 cm)
13″ (33.0 cm)
Allow at least 12″ (30.5 cm) above the reservoir for access to the lid and top components.
Nitrogen or clean dry air
70 psi to the dispense control box
DataStream empty-reservoir float sensor
Need heated dispensing, a special delivery method, or a configuration you don’t see here? Cee® offers custom solutions built around your material, equipment, and process.
See examples of our custom equipment, then contact Cee® to discuss your dispense requirements.
