Cee® 200X and 200X-F Spin Coaters – MIT Fabtools Listing

Unknown

Spin Coater, 200mm Spin Coater, 200X (Legacy)

Source:MIT Fabtools

Material: Unknown

Source:Unknown

MIT’s Fabtools listing explicitly references Cee® 200X-F and Cee® 200X spin coaters within its shared nanofabrication tool set. The indexed listing associates these systems with Spinner-EBL, Spinner-Polymer, and Photo / Coat usage categories.

Publication Year: Unknown

Process Overview

The MIT Fabtools page is JavaScript-gated in the live browser view, but the indexed search snippet explicitly exposes two Cee® platforms: Cee® 200X-F and Cee® 200X. Those same indexed results also tie the tools to Spinner-EBL, Spinner-Polymer, and Photo / Coat, making this a useful university facility reference for Cee® equipment in shared lithography and coating workflows. Because the live page does not render without JavaScript in this environment, additional details such as materials, wafer size, and fuller tool descriptions should be left unspecified unless you verify them directly on the site.

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Related Research

Tools – BioNIUM Nanofabrication Facility

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Spin Coater, 200mm Spin Coater, 200X (Legacy)

The University of Miami BioNIUM nanofabrication facility tool listing explicitly includes a Cee® 200X Precision Spin Coater as part of its lithography-related equipment set.

Direct Photopatterning of Metal Oxide Structures Using Photosensitive Metallorganics

4 inch

MIBK

Spin Coater, 200mm Spin Coater, 100 (Legacy)

This Georgia Tech paper describes direct photopatterning of mixed-metal oxide films using a photosensitive metallorganic precursor. The precursor films were spin coated onto 100 mm single-side polished silicon wafers using a Cee® Model 100 CB Spin Coater and Bake Unit

Cee® Spin Coater & Baking Tools – University of Kansas Nanofabrication Facility

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Spin Coater, 200mm Spin Coater, 200X (Legacy), Bake Plates, Apogee® 200 Bake Plate, 1300X (Legacy)

The University of Kansas Nanofabrication Facility lists a Cee® coat and bake workflow that includes a Cee® 200CBX Programmable Spin Coater, Cee® 1300X Hot Plate, and Cee® Apogee® Hot Plate. The page also states that the 200CBX supports multiple chuck sizes for a variety of substrate sizes.