Overview

The OptiFlow™ Exhaust Control System is an active exhaust management solution designed specifically for Apogee® Spin Coaters and Apogee® Spin Developers. In spin coating and developing applications, stable exhaust flow directly impacts solvent evaporation, coating uniformity, and film thickness control. Rather than relying solely on facility exhaust, OptiFlow™ provides programmable, real-time exhaust control at the process bowl. The result is improved coating consistency, tighter thickness control, and enhanced process repeatability across a wide range of semiconductor and advanced material applications.

Key Capabilities

OptiFlow™ is fully programmable within DataStream™ control software, allowing exhaust performance to be defined on a per-recipe and per-step basis. Users can precisely adjust exhaust rates during dispense, spread, spin, or develop stages to match specific materials and process requirements. The system operates within a working range of 0–30 CMH in 0.1 CMH increments and maintains airflow within ±0.5 CMH using real-time monitoring and feedback.

Exhaust can be controlled either by percentage output or by commanding a target airflow value in CMH. Both the commanded setpoints and actual airflow performance are continuously logged alongside process data, enabling full traceability, troubleshooting, and export for validation or documentation purposes.

Configurable idle exhaust settings allow airflow to be reduced to a defined baseline or turned off entirely when the equipment is not processing. At the completion of a recipe, the system automatically returns to the configured idle exhaust value, ensuring predictable operation while preserving facility exhaust capacity in shared or capacity-limited cleanroom environments.

Safety & Facilities

By actively removing solvent vapors at the source, the OptiFlow™ Exhaust Control System enhances operator safety and helps maintain a cleaner process environment. Controlled exhaust reduces vapor accumulation within the spin bowl and cabinet, supporting stable processing conditions and cleanroom compatibility.

Idle exhaust management minimizes unnecessary facility load, making OptiFlow™ especially beneficial in labs and fabs with shared exhaust systems or restricted airflow capacity. The system supplements facility exhaust rather than replacing it, providing precise local control without requiring major infrastructure changes.

Compatibility

The OptiFlow™ Exhaust Control System is available for all Apogee® mounting configurations, including benchtop, flange-mount, and integrated workstation installations. 

• Apogee® 200 Spin Coater

• Apogee® 450 Spin Coater

• Apogee® 200 Spin Developer

• Apogee® 450 Spin Developer