Recessed Spin Chucks are typically recommended for spin coating square and rectangular substrates. A substrate-matched cavity locates the piece within the chuck surface, providing a repeatable fit for photomasks, microscope slides and similar substrates.
Each recessed chuck is custom made for your substrate dimensions and process requirements.
SKU unavailable — custom made to order.
Developing or cleaning a rectangular substrate?
A square or rectangular substrate presents a different coating geometry from a circular wafer. The recessed design places the substrate in a machined cavity made for its footprint and thickness. Typical applications include microscope slides, photomasks, displays and other rectangular pieces. A correctly loaded substrate is centered by the recess, so a separate centering device is not needed. Finger access features assist removal on the supplied recessed configuration.
The surrounding chuck surface emulates a round wafer to reduce airflow turbulence around a square or rectangular substrate and improve coating uniformity at the corners and edges. The recess is matched to the substrate dimensions and process requirements.
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Comparison
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Recessed Chuck
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Captive Chuck
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Typical processes
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Spin coating
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Developing and cleaning
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Corner uniformity
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Emulates a round wafer to improve coating uniformity at corners and edges
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Typically used when corner coating uniformity is less critical or the process allows an exclusion area
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Substrate retention
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Vacuum pad
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Vacuum or mechanical holding, depending on configuration
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Cleaning
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More surrounding chuck material to clean
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Typically requires less cleaning because there is less chuck material
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Backside contamination
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Designed to minimize backside contamination; results depend on the process
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Designed to minimize backside contamination; results depend on the process
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Provide width, length, thickness and material, plus a drawing when the outline has special features. Include the permitted contact areas, process chemistry and Cee spin-coater model. These details define the recess and its fit.
Construction options include Delrin®, PVDF, PTFE, stainless steel, PEEK and anodized aluminum. The selection depends on chemistry, contact needs and the tool configuration. Confirm the spindle interface and intended process conditions together.
Each recessed chuck is made for specific substrates. Use the specified installation, loading and removal procedures, and keep the matched substrate and recess together. A piece that fits loosely in an existing cavity is not automatically an appropriate match.
Square and rectangular pieces
Spin coating
Substrate-matched recess
Vacuum; confirm supplied configuration
Matched to the specified Cee tool
Defined for substrate and process
