Facility / company reference

Spin Coater – LSU New Orleans AMRI

This source documents photoresist coating and baking for thin-film patterns.

How Cee® equipment is used

The AMRI process description identifies the Cee® 200-CB combination system for photoresist application and baking during thin-film patterning.

Equipment reported
Cee 200-CB
Source type
Facility process reference
Publication year
Not recorded
Materials
Photoresist
Substrate
Not reported
Source
LSU New Orleans AMRI

Process context

This is a facility equipment reference. It documents the listed capability rather than a particular research result. Confirm current access, training, and operating procedures with the facility. Materials recorded for this reference include Photoresist.

Source and equipment evidence

LSU New Orleans AMRI. Spin Coater – LSU New Orleans AMRI.

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Application summary prepared by Cee. The original source remains the authority for its methods and findings.

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Spin coating, bake and chill, temporary bonding and debonding.

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