Nanoindentation Analysis of SU-8 Coated Wafers at Different Baking Phases

How Cee® equipment is used

The method identifies a Cee® 200CBX for SU-8 application and a Cee® 1300X for baking. Nanoindentation is used to compare the coated wafers at different bake stages.

Equipment reported

Cee 200CBX; Cee 1300X

Source type

Research paper

Publication year

Not recorded

Materials

SU-8

Substrate

Not reported

Source

PubMed Central

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include SU-8.