Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams

How Cee® equipment is used

The method names a Cee® 200X for S1811 coating and a Brewer Science 1300X for vacuum soft-baking. These steps support fabrication of the SOI MEMS ring resonator.

Equipment reported

Cee 200X; Brewer Science 1300X

Source type

Research paper

Publication year

Not recorded

Materials

Photoresist

Substrate

SOI

Source

PubMed Central

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include Photoresist.