CNSE Innovation Lab | University at Albany

How Cee® equipment is used

The CNSE Innovation Lab describes an Apogee® spin-coat/bake system for spin-on film processing. The recorded source does not identify the individual module sizes.

Equipment reported

Apogee spin-coater/bake system

Source type

Facility process reference

Publication year

Not recorded

Materials

Photoresist

Substrate

Not reported

Source

University at Albany CNSE Innovation Lab

Process context

This is a facility equipment reference. It documents the listed capability rather than a particular research result. Confirm current access, training, and operating procedures with the facility. Materials recorded for this reference include Photoresist.