Cleanroom – Center for Materials Research – Naval Postgraduate School

How Cee® equipment is used

The Naval Postgraduate School describes a Cee® 200X coater and an Apogee® spin developer in its MEMS cleanroom. The recorded source does not establish the developer's model size.

Equipment reported

Cee 200X; Apogee spin developer

Source type

Government facility process reference

Publication year

Not recorded

Materials

Photoresist

Substrate

Not reported

Source

Naval Postgraduate School Center for Materials Research

Process context

This is a facility equipment reference. It documents the listed capability rather than a particular research result. Confirm current access, training, and operating procedures with the facility. Materials recorded for this reference include Photoresist.