Development of an Adaptive X-ray Research Facility and a Direct Bonded Silicon Reference Object for Computed Tomography

How Cee® equipment is used

Jeffery Thousand's doctoral research identifies a Cee® 200 and Cee® 1100FX for resist coating and bake processing. These steps support fabrication of a directly bonded silicon reference object for computed tomography; the source does not attribute the bonding step to a Cee® bonder.

Equipment reported

Cee 200; Cee 1100FX

Source type

Thesis

Publication year

2020

Materials

Photoresist

Substrate

Si

Source

UNC Charlotte Doctoral Thesis

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include Photoresist.