SU-8 lithography – LNF

How Cee® equipment is used

The page provides SU8 spin curves derived on the Apogee Spinner ROBIN and processing recommendations.

Equipment reported

Apogee® Spin Coater (ROBIN)

Source type

Process recipe

Publication year

Not recorded

Materials

SU-8

Substrate

Not reported

Source

LNF Wiki, University of Michigan Lurie Nanofabrication Facility

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include SU-8.