CEE Resist Developer – Semiconductor Nanofabrication Laboratory – Confluence

How Cee® equipment is used

RIT's archived procedure identifies a Cee® resist developer using CD-26 chemistry. The source provides historical operating instructions; it does not establish the current facility configuration.

Equipment reported

Cee developer; model unspecified

Source type

Facility process reference

Publication year

Not recorded

Materials

CD-26 developer

Substrate

Not reported

Source

RIT Semiconductor Nanofabrication Laboratory

Process context

This is a facility equipment reference. It documents the listed capability rather than a particular research result. Confirm current access, training, and operating procedures with the facility. Materials recorded for this reference include CD-26 developer.