Handle large substrates with confidence. The Apogee® 300 Bake Plate delivers precision, thermal uniformity, and unmatched repeatability. Packed with advanced features, it’s built to support your process as demands grow.
300mm wafers? Large panels? Photomasks? No problem! Enjoy precise thermal control and consistent results, no matter the substrate size. Tackle larger substrates with confidence and precision.
Start processing wafers quickly. Set up your Apogee® Benchtop Bake Plate with ease—no complicated installation required.
Enjoy unrivaled repeatability and uniformity in every bake process. Built for long-lasting durability and backed by lifetime process support, Apogee® Bake Plates are your ideal solution for automated bake processing.
Engineered for superior performance, usability, versatility—and peace of mind.
On-board 7-inch color touchscreen with DataStream™ OS included for visibility and your ease-of-use.
Adjustable wafer stops for precise centering of various substrate sizes, round or square, for maximum versatility.
Featuring type III military-grade hardcoat anodized surface—ultra-flat, extremely scratch-resistant, and built to last.
Smart Pin™ Technology and precision ramping controls enable multi-stage baking and gentle warm-up for delicate, thermally sensitive substrates.
Recipe-controlled baking: with vacuum, gas-proximity, gravity contact, or Smart Pin™ Technology, you get complete process control.
Knowledge is power. With DataStream™ technology, monitor and manage in real time, ensuring production-quality results from anywhere. Proactive warnings and detailed log files give you the information you need to succeed.
Process parameters and measurements are logged in real-time. Export in multiple formats for analysis, troubleshooting, and process optimization.
Access your Apogee® Bake Plate remotely via any web browser for real-time monitoring, adjustments, and recipe management. Create, modify, upload, download, and archive recipes seamlessly.
NRTL certification is crucial for semiconductor equipment, ensuring compliance with safety standards set by regulatory bodies like OSHA and ANSI.
Cee® bake plates are NRTL listed right out of the box…
…your safety department is going to love you.
When advanced processes require advanced features, Cee® has you covered. Personalize your bake plate right from the factory.
Bake process sensitive to oxidation? Shield your wafer with a blanket of nitrogen or other inert gas with the N2 Purge option.
Crank up the heat! Upgrade your Apogee® Bake Plate to allow for processes that demand a high temperature bake.
Busy workbench? Give your wafer a dedicated cool-down spot. Bring fresh baked wafers to room temperature in seconds with the optional Chill Station.
300mm Round or 12″ x 12″ Square
4 inch Round (smaller sizes supported with limited functionality)
300°C (400°C optional)
0.1°C
±0.3% across working area
7″ Full Color Touchscreen (included)
0-19 mm
Unlimited / Unlimited
0.1 mm
0.1 s
146 lb (66.2 kg)
220 lb (kg)
W: 18.75″ (477mm)
D: 26.25″ (667mm)
H: 17.75″ (451mm)
W: 34″ (mm)
D: 34″ (mm)
H: 38″ (mm)
208-230 VAC
1/4″ Push to Connect, 35psi (241kPa)
16.3A
1/4″ Push to Connect, <20″ Hg (33kPa abs)
2″ OD, 0.4” H2O@10CFM (100Pa@17 CMH)
With four decades of experience, our experts will collaborate closely with you to understand your requirements and deliver solutions that exceed expectations.
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Cee® is a registered trademark of Cost Effective Equipment, LLC.
