Thesis

Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system

This thesis describes silicon cantilever microfabrication for integrated SPM/SEM. The workflow uses Cee® 100CB.

How Cee® equipment is used

Methods identify the Cee 100CB hotplate and describe TI Prime/AZ1518 lithography.

Equipment reported: Cee® 100CB
Source type: Doctoral thesis
Publication year: Not recorded
Materials: Photoresist
Substrate: Si
Source: TU Ilmenau Thesis

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include Photoresist.

Source and equipment evidence

TU Ilmenau Thesis. Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system.

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Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system

How Cee® equipment is used

Process context

Source and equipment evidence

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