Method for directed self-assembly

How Cee® equipment is used

Example solvent/developer exposure tests use a Cee100CB spin-coater/bake-plate tool.

Equipment reported

Cee® 100CB

Source type

Patent experimental example

Publication year

Not recorded

Materials

Photoresist

Substrate

Not reported

Source

Google Patents

Process context

This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims. Materials recorded for this reference include Photoresist.