Cee® Spin Coaters

Cost Effective Equipment precision spin coaters feature high spin speed resolution, broad chemical compatibility, and exceptional reliability.


Product Options


With numerous configuration options and a huge variety of substrate-specific spin chucks to choose from, Cost Effective Equipment spin coaters can handle almost any application imaginable. Compare product specifications below to see which configuration is right for you, or contact us to request more information.

 

ApogeeSpin Coater

with Datastream Technology

Cee® 300X Spin Coater

  Cee® 200X spin coater Cee® 300X spin coater
Substrate Sizes
Up to 200 mm round or 7″ × 7″ square Up to 450 mm round or 14″ × 14″ squ

Precision

Maximum Spin Speed
12,000 rpm 6,000 rpm
4,000 rpm and 3,000 rpm configurations available for additional acceleration capabilities
Spin Speed Resolution
Within 0.2 rpm Within 0.2 rpm
Spin Speed Repeatability
Within 0.2 rpm Within 0.2 rpm
Spin Speed Acceleration
Up to 23,000 rpm/s with
200-mm substrate Up to 3,000 rpm/s with 6″ × 6″ × 0.250″ photomask recessed chuck Up to 30,000 rpm/s unloaded
Up to 23,000 rpm/s with 300-mm substrate Up to 3,000 rpm/s with 350 mm × 6 mm round recessed chuck Up to 400 rpm/s with 14″ × 14″ × 11 mm photomask recessed chuck Up to 30,000 rpm/s unloaded

Control

Control Interface
Datastream Technology Onboard Windows®-based PC with 7″ touch screen display
Third-Party Integration
System capable of controlling third-party host software for high-end IDI/‌Cybor/‌Mykrolis positive displacement pumps
Automated Dispense Control
Simultaneously trigger up to 16 automated dispense nozzles
Dispense or Component Outputs
16
Spin Control
Bidirectional speed control (oscillating chuck) In-process dynamic speed/‌acceleration control

Programmability

Onboard Storage
Up to 250,000 process recipe programs with a virtually unlimited number of program steps per recipe
Step Time
0.1 to 9,999.9 seconds with a resolution of 0.1 second
Security
Password protection available at no charge

Design

Spin Bowl Design
  • High Density Polyethylene spin bowl for optimal material compatibility
  • Drain and exhaust ports located in bottom of bowl
  • Optional bowl materials: PTFE (for chemical compatibility)
  • Disposable polyethylene liners available
  • Optional polyethylene splash ring available
  • Stainless steel spin bowl
  • Drain and exhaust ports located in bottom of bowl
  • Optional bowl materials: ETFE-coated stainless steel; polyethylene bowl liner (non-disposable)
  • Optional Teflon® or polyethylene splash ring available
Spin Environment
Optional nitrogen purge available for an inert spin environment
Reliability Features
Indirect drive system protects spin motor from contact with process chemicals and solvents

Vacuum and lid interlock with mechanical lock to prevent accidental process disruption (only 300X)
Dimensions

13.25″ W × 19″ D × 12″ H
(33.65 cm W × 48.26 cm D × 30.48 cm H)

Machine weight: 40 lb (18.14 kg)

Shipping weight: 120 lb (45.36 kg)

27.75″ W × 34.75″ D × 20.25″ H (70.5 cm W × 88.3 cm D × 51.5 cm H)

Machine weight: 115 lb (52.2 kg)

Shipping weight: 250 lb (113.4 kg)

Utilities

Voltage Ranges
100–125, 208–240 VAC 50/60 Hz 208–240 VAC 50/60 Hz
Power Requirements
655 watts
6.0 amps
1350 watts
7.0 amps
Drain Port
0.75″ OD 1″ OD
Exhaust Port
1″ OD 1.5″ OD
Vacuum
20–25 in Hg 20–25 in Hg
Exhaust
20–50 cfm at 0.2″ water column 20–50 cfm at 0.2″ water column
Nitrogen or CDA (automated dispense)
70 psi 70 psi

Support

Warranty
1-year full warranty on parts and labor
Technical Support
Free remote technical support (phone, email) for the life of the product
Applications Support
Free applications and process assistance for the life of the product
Request More Information