Cee® Spin Coaters
Cost Effective Equipment precision spin coaters feature high spin speed resolution, broad chemical compatibility, and exceptional reliability.
Product Options
- Learn how Datastream™ Technology can improve the efficiency and quality of your process
- Increase your tools versatility with the Universal Spin Chuck set
With numerous configuration options and a huge variety of substrate-specific spin chucks to choose from, Cost Effective Equipment spin coaters can handle almost any application imaginable. Compare product specifications below to see which configuration is right for you, or contact us to request more information.
Apogee™Spin Coater |
Cee® 300X Spin Coater |
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Substrate Sizes |
Up to 200 mm round or 7″ × 7″ square | Up to 450 mm round or 14″ × 14″ squ |
Precision |
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Maximum Spin Speed |
12,000 rpm |
6,000 rpm 4,000 rpm and 3,000 rpm configurations available for additional acceleration capabilities |
Spin Speed Resolution |
Within 0.2 rpm | Within 0.2 rpm |
Spin Speed Repeatability |
Within 0.2 rpm | Within 0.2 rpm |
Spin Speed Acceleration |
Up to 23,000 rpm/s with 200-mm substrate Up to 3,000 rpm/s with 6″ × 6″ × 0.250″ photomask recessed chuck Up to 30,000 rpm/s unloaded |
Up to 23,000 rpm/s with 300-mm substrate Up to 3,000 rpm/s with 350 mm × 6 mm round recessed chuck Up to 400 rpm/s with 14″ × 14″ × 11 mm photomask recessed chuck Up to 30,000 rpm/s unloaded |
Control |
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Control Interface |
Datastream™ Technology | Onboard Windows®-based PC with 7″ touch screen display |
Third-Party Integration |
System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positive displacement pumps | |
Automated Dispense Control |
Simultaneously trigger up to 16 automated dispense nozzles | |
Dispense or Component Outputs |
16 | |
Spin Control |
Bidirectional speed control (oscillating chuck) In-process dynamic speed/acceleration control | |
Programmability |
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Onboard Storage |
Up to 250,000 process recipe programs with a virtually unlimited number of program steps per recipe | |
Step Time |
0.1 to 9,999.9 seconds with a resolution of 0.1 second | |
Security |
Password protection available at no charge | |
Design |
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Spin Bowl Design |
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Spin Environment |
Optional nitrogen purge available for an inert spin environment | |
Reliability Features |
Indirect drive system protects spin motor from contact with process chemicals and solvents Vacuum and lid interlock with mechanical lock to prevent accidental process disruption (only 300X) | |
Dimensions |
13.25″ W × 19″ D × 12″ H Machine weight: 40 lb (18.14 kg) Shipping weight: 120 lb (45.36 kg) |
27.75″ W × 34.75″ D × 20.25″ H (70.5 cm W × 88.3 cm D × 51.5 cm H) Machine weight: 115 lb (52.2 kg) Shipping weight: 250 lb (113.4 kg) |
Utilities |
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Voltage Ranges |
100–125, 208–240 VAC 50/60 Hz | 208–240 VAC 50/60 Hz |
Power Requirements |
655 watts 6.0 amps |
1350 watts 7.0 amps |
Drain Port |
0.75″ OD | 1″ OD |
Exhaust Port |
1″ OD | 1.5″ OD |
Vacuum |
20–25 in Hg | 20–25 in Hg |
Exhaust |
20–50 cfm at 0.2″ water column | 20–50 cfm at 0.2″ water column |
Nitrogen or CDA (automated dispense) |
70 psi | 70 psi |
Support |
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Warranty |
1-year full warranty on parts and labor | |
Technical Support |
Free remote technical support (phone, email) for the life of the product | |
Applications Support |
Free applications and process assistance for the life of the product |