Cee® Spin Coaters
Cost Effective Equipment precision spin coaters feature high spin speed resolution, broad chemical compatibility, and exceptional reliability.
Product Options
Learn more about our new Universal Spin Chucks.
Apogee™
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Cee® 300X
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Substrate Sizes |
Up to 200 mm round or 7″ × 7″ square |
Up to 450 mm round or 14″ × 14″ square |
Precision |
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Maximum Spin Speed |
12,000 rpm |
6,000 rpm 4,000 rpm and 3,000 rpm configurations available for additional acceleration capabilities |
Spin Speed Resolution |
Within 0.2 rpm |
Within 0.2 rpm |
Spin Speed Repeatability |
Within 0.2 rpm |
Within 0.2 rpm |
Spin Speed Acceleration |
Up to 23,000 rpm/s with Up to 3,000 rpm/s with 6″ × 6″ × 0.250″ photomask recessed chuck Up to 30,000 rpm/s unloaded |
Up to 23,000 rpm/s with 300-mm substrate Up to 3,000 rpm/s with 350 mm × 6 mm round recessed chuck Up to 400 rpm/s with 14″ × 14″ × 11 mm photomask recessed chuck Up to 30,000 rpm/s unloaded |
Control |
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Control Interface |
Datastream™ Technology | Onboard Windows®-based PC with 7″ touch screen display |
Third-Party Integration |
System capable of controlling third-party host software for high-end IDI/Cybor/Mykrolis positive displacement pumps |
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Automated Dispense Control |
Simultaneously trigger up to 16 automated dispense nozzles |
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Dispense or Component Outputs |
16 |
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Spin Control |
Bidirectional speed control (oscillating chuck) In-process dynamic speed/acceleration control |
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Programmability |
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Onboard Storage |
Up to 250,000 process recipe programs with a virtually unlimited number of program steps per recipe |
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Step Time |
0.1 to 9,999.9 seconds with a resolution of 0.1 second |
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Security |
Password protection available at no charge |
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Design |
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Spin Bowl Design |
High Density Polyethylene spin bowl for optimal material compatibility Drain and exhaust ports located in bottom of bowl Optional bowl materials: PTFE (for chemical compatibility) Disposable polyethylene liners available Optional polyethylene splash ring available |
Stainless steel spin bowl Drain and exhaust ports located in bottom of bowl Optional bowl materials: ETFE-coated stainless steel; polyethylene bowl liner (non-disposable) Optional Teflon® or polyethylene splash ring available |
Spin Environment |
Optional nitrogen purge available for an inert spin environment |
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Reliability Features |
Indirect drive system protects spin motor from contact with process chemicals and solvents Vacuum and lid interlock with mechanical lock to prevent accidental process disruption (only 300X) |
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Dimensions |
13.25″ W × 19″ D × 12″ H Machine weight: 40 lb (18.14 kg) Shipping weight: 120 lb (45.36 kg) |
27.75″ W × 34.75″ D × 20.25″ H (70.5 cm W × 88.3 cm D × 51.5 cm H) Machine weight: 115 lb (52.2 kg) Shipping weight: 250 lb (113.4 kg) |
Utilities |
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Voltage Ranges |
100–125, 208–240 VAC 50/60 Hz |
208–240 VAC 50/60 Hz |
Power Requirements |
655 watts |
1350 watts |
Drain Port |
0.75″ OD |
1″ OD |
Exhaust Port |
1″ OD |
1.5″ OD |
Vacuum |
20–25 in Hg |
20–25 in Hg |
Exhaust |
20–50 cfm at 0.2″ water column |
20–50 cfm at 0.2″ water column |
Nitrogen or CDA (automated dispense) |
70 psi |
70 psi |
Support |
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Warranty |
1-year full warranty on parts and labor |
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Technical Support |
Free remote technical support (phone, email) for the life of the product |
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Applications Support |
Free applications and process assistance for the life of the product |
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