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Bake Plate Accesories

Nitrogen Purge

  • low-oxygen environment
  • minimize the risk of safety hazards
  • reduces oxidation of materials 
  • compatible with nitrogen or other inert gases
  • exhausted hood
  • capable of providing ~100-ppm oxygen environment (with 30-psi/5-lpm flow). 
  • Technical Resource – Click Here

400ºC Option

  • allows the standard 300ºC Apogee® Bake Plate go up to 400ºC 
  • for high temperature processes
  • Cool Touch Hood promotes operator safety

Plastic Tipped Lift Pins

  • extra layer of protection to prevent scratching or damage to substrates
  • available in:
    • Vespel®: 300ºC max bake temperature
    • Teflon™: 200ºC max bake temperature

Vacuum Pump

  • dedicated vacuum supply
  • cleanroom compatible
  • oil-less and maintenance-free
  • compact and quiet (50 dB)
  • available in 110V or 220V 
  • 20-25 in/Hg, 20L/min

Light Tree

  • LED 3 status tree 
  • red – error
  • yellow – idle
  • green – in process
  • color cycle – initialization 

Passive Chill Station

Hood Mounted

  • space saving design
  • tweezer or vacuum wand pick up
  • standard 200mm wafer cools from 200C to ambient temperature <10 seconds
  • size matched to bake plate

1 or 5 Tier

  • table top design 
  • available in 1 or 5 stack (pictured)
  • tweezer or vacuum wand pick up
  • max wafer size: 300mm

Need something out of the ordinary?

click here for customization